3-axis deflection units
kākoʻo lōʻihi nalu: 10640nm, 10200nm, 9400nm
XY2-100 protocol
ka hana ʻana i nā māla hana nui me kahi wahi liʻiliʻi
palapala noi ʻoihana kiʻekiʻe, hana nui
kiʻekiʻe 2000 * 2000mm kahua hana
0.12@3508350mm@10640nm
0.64@2000x2000mm@10640nm
hōʻailona ʻāina nui loa
ʻōwili e ʻōwili ʻili hōʻailona