Ntụkwasị obi ịdị mma
Na-achụso ahụmịhe onye ọrụ kacha
Nye mmesi obi ike gburugburu gburugburu
100% nchọpụta ọ̀tụ̀tụ̀ okpomọkụ
Nleba anya nlegharị anya ọnọdụ okpomọkụ na-arụ ọrụ zuru oke
Wepụta ezigbo akụkọ data
Ndokwa nke ziri ezi
Site na otutu iterations nke ọkwọ ụgbọ ala na ihe mmetụta moto, FEELTEK na-enye ezi nguzozi nke ọma iji kwe nkwa nhazi elu nke ọma.
Mgbochi mkpagharị
Site na njikarịcha nke onye ọkwọ ụgbọ ala na ihe mmetụta moto, yana amplifier, anyị na-eme ka a na-achịkwa drift suppression.
Ịrụ ngwa ngwa & njikwa ihe karịrị
Ọsọ moto na arụmọrụ osooso bụ nkwa maka nkuku nkenke na ịfefe oke, nke a bụkwa ụkpụrụ ntinye maka nhazi nkenke (ndochi ọsọ dị elu, etching.etc)
Ịdị n'otu
Gbaa mbọ hụ na otu ọsọ na nkenke XY site na ya.
Gbaa mbọ hụ na ndochi nke ọma na okirikiri micro-processing.
Melite oke nke ndochi mmụọ ozi na ụzọ kwụ ọtọ.
Z axis calibration
Site na ikpo okwu njikwa ihe mmetụta dị elu dị elu, FEELTEK na-eme linearity, mkpebi na nsonaazụ data mbanye okpomọkụ nke axis ike nwere ike ịhụ. A na-ekwe nkwa ịdị mma.
Nyochaa akụkọ
●Ebumnobi mmezi: izi ezi ọnọdụ, mpụ okpomọkụ na linearity nke axis Z.
●Usoro nhazi nhazi: ihe nchọta oke nkenke dị elu.
●Ngwá ọrụ mmezi: SICK (C30T05) .
●Ngosipụta ngwa ọrụ nhazi: Oke: 30mm, nkenke: 0.3μm, Oge nlele: 12.5μs.
●Cal ibration
linearity: 99. 5%@3°
Ntugharị okpomọkụ: ≤4 μm@4hours
mkpebi: ≤1.2 μm
