Mtengo wa FR30
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3D Dynamic Focus System - FR30-C
3-axis deflection mayunitsi
kutalika kwa mawonekedwe: 10640nm, 10200nm, 9400nm
XY2-100 protocol
ntchito munda: 300 * 300mm kuti 1600 * 1600mm
kukonza minda yayikulu yogwirira ntchito yokhala ndi malo ang'onoang'ono
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3D Dynamic Focus System - FR30-F
3-axis deflection mayunitsi
kutalika kwa mawonekedwe: 1064nm
XY2-100 protocol
mtundu wokhotakhota wa pamwamba ndi mtundu waukulu wazolemba zamitundu zosankha
kukonza minda yayikulu yogwirira ntchito yokhala ndi malo ang'onoang'ono