3-axis deflection units
lagolago umi galu: 10640nm, 10200nm, 9400nm
XY2-100 protocol
fa'agaioiina o fanua galue tetele ma le la'ititi la'ititi
talosaga alamanuia maualuga, faatinoga sili
maualuga 2000 * 2000mm fanua galuega
0.12@3508350mm@10640nm
0.64@2000x2000mm@10640nm
fa'ailoga vaega tele tele
ta'avale fa'ailoga pa'u